Phase stability of hafnium oxide and zirconium oxide on silicon substrate
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چکیده
منابع مشابه
Phase stability of hafnium oxide and zirconium oxide on silicon substrate
Phase stabilities of Hf-Si-O and Zr-Si-O have been studied with first-principles and thermodynamic modeling. From the obtained thermodynamic descriptions, phase diagrams pertinent to thin film processing were calculated. We found that the relative stability of the metal silicates with respect to their binary oxides plays a critical role in silicide formation. It was observed that both the HfO2/...
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ژورنال
عنوان ژورنال: Scripta Materialia
سال: 2007
ISSN: 1359-6462
DOI: 10.1016/j.scriptamat.2007.04.011